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Wet bench process equipment
PRODUCTS INFORMATION
6” WAFERx2cassette /8”x1 cassette manual transfer WET BENCH
1. SC1,SC2,HF,HCL,BOE,SPM Bath
2. QDR,O/F Bath
3. Spin dryer
4. Option： Agitation unit
Wafer Rotating unit
HEPA unit
Ultrasonic cleaner
Quartz inline heater
Recirculation and filteration
Chemical buffer tank and dosing unit