8” WAFERx2cassette Multi-robotic automatic wet bench

Wet bench process equipment

PRODUCTS INFORMATION

DEMO Video
6. Option：	HEPA unit Megasonic cleaner Quartz inline heater Recirculation and filteration Chemical buffer tank and dosing unit CCD
1. Load(wet in/dry in) 2. SC1,SC2,HF,HCL,BOE 3. QDR,O/F 4. Spin dryer 5. Unload(dry out)