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Wet bench process equipment
PRODUCTS INFORMATION
Wet Bench:SC1, SC2, BOE, SPM
1. SC1,SC2,HF,HCL,BOE,SPM Bath
2. QDR,O/F
3. Option： Spin dryer
Agitation unit
Wafer rotating unit
HEPA unit
Ultrasonic cleaner
Quartz inline heater
Recirculation and filteration
Chemical buffer tank and dosing unit
SECS/GEM